Resistance Evaporation Coating Machine

  

Place of Origin:
China Beijing







Resistance evaporation coating machine
coat electronic film, reflection film, transmission film, decorative film etc. The vacuum system of the coater could adopt molecular pump. DM-450C and DM-700C can add optical film thickness controller.



Parameter





Item





Unit





DM-300B





DM-450A





DM-450C





DM-700C







Chamber size(diameter ?height)





mm





?00?50





?50?40





?50?40





?00?80







Substrate diameter





mm





?80





?20





?20





?00







Ultimate pressure





pa





5?0 -4





5?0 -4





5?0 -4





5?0 -4







Pumping speed (from 1?0 5 to 2?0 -3 pa





min





d20





d20





d20





d20







Evaporator source





Electrode(pair)





--





4





4





4





4







Electrode model





Copper





Copper





Water cooling





Water cooling







Voltage





V





6, 12, 24





6, 12, 24





5, 10, 10, 20





5, 10, 20







Current





A





240, 120, 60





240, 120, 60,





500, 250, 125





500, 250, 125







Power





kw





1.5





1.5





2.5





2.5







Total power





kw





5





6.5





8





15







Bombarding





Max. power rating





kw





0.6





0.6





0.6





0.6







Voltage





V





3000





3000





3000





3000







Baking





Max. power rating





kw





0.5





1





1





4.5







Max temperature





200





200





200





300







Substrate rotation





r/min





10-30





5-26





5-26





4-40







Outline size(W D H)





mm





1160?60?540





1460?080?790





1460?080?790





1760?240?280






Resistance evaporation coating machine coat electronic film, reflection film, transmission film, decorative film etc. The vacuum system of the coater could adopt molecular pump. DM-450C and DM-700C can add optical film thickness controller.